Coupling-type clean space apparatus

Details Coupling-type clean space apparatus Coupling-type clean space apparatus

1993-02-09

1995-06-20

Warden, Robert J.

Gas separation

Combined or convertible

In environmental air enclosure

55356, 55473, 454187, 454188, 454191, B01D 5000

Patent

active

054257930

ABSTRACT:
According to the present invention, chamber units are sequentially coupled with each other to thereby provide a volume of clean space, and whereby different environments can be maintained in the different chamber units. An air blowhole or door is provided at an opening section of each chamber unit. Moreover, a space section can be defined at the coupling part of the chamber units, and a suction pump and a suction hose can be provided in the space section, so as to prevent the environments of the different chambers from influencing one another.

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patent: 5064457 (1991-11-01), Weber
patent: 5072658 (1991-12-01), Bogage
patent: 5096477 (1992-03-01), Shinoda et al.

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