Etching a substrate: processes – Forming or treating an article whose final configuration has...
Patent
1995-04-13
1998-12-15
Dote, Janis L.
Etching a substrate: processes
Forming or treating an article whose final configuration has...
216 2, 216 51, 216 99, G02B 626, C03C 1500, C25F 302
Patent
active
058492046
ABSTRACT:
A simplified, suitable-to-mass-production and high-reliable coupling structure for connection between optical waveguides or between an optical waveguide and an optical fiber is provided. A tenon is formed at the end of a substrate on which an optical waveguide is formed and a groove is formed on the end portion of another substrate on which an optical waveguide is formed. These optical waveguides are connected by fitting the tenon into the groove. By placing an optical fiber instead of an optical waveguide on the grooved substrate, an optical waveguide and an optical fiber can be connected. The tenon and the groove are formed in good mass-production at a high precision by working silicon substrates by performing chemical anisotropic etching using a mask pattern formed at the end portion of each substrate.
REFERENCES:
patent: 4079404 (1978-03-01), Comerford et al.
patent: 5579424 (1996-11-01), Schneider
"Development of Silica Based Guided-Wave 1x16 Splitter Module"; 1992; Electronics/Information/Communication Institute; #C-186 pp. 4-208.4.
Dote Janis L.
NEC Corporation
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