Coupling member and plasma processing apparatus

Details Coupling member and plasma processing apparatus Coupling member and plasma processing apparatus

2009-03-27

2011-11-08

Estremsky, Gary (Department: 3677)

Expanded, threaded, driven, headed, tool-deformed, or locked-thr

Externally threaded fastener element, e.g., bolt, screw, etc.

Resiliently flexible

C411S383000, C411S900000, C411S009000

Reexamination Certificate

active

08052364

ABSTRACT:
A coupling member is employed to couple components of a plasma processing apparatus which processes a substrate by using a plasma. The coupling member includes a threaded rod portion which passes through one component and is screwed and fixed to another component, a head portion which supports the one component and has a diameter larger than that of the threaded rod portion, and an elastic portion which is interposed between the threaded rod portion and the head portion, wherein the elastic portion has a larger strain to an external force than those of the threaded rod portion and the head portion.

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patent: 2006/0011300 (2006-01-01), Kim et al.
patent: 2010/0003824 (2010-01-01), Kadkhodayan et al.

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