Coupling for stationary and movable vacuum chambers

Details Coupling for stationary and movable vacuum chambers Coupling for stationary and movable vacuum chambers

1978-11-22

1981-03-31

Pianalto, Bernard D.

Coating apparatus

With vacuum or fluid pressure chamber

118719, 118733, 277 3, C23C 1308

Patent

active

042586453

ABSTRACT:
Coupling valve for joining stationary and movable evacuatable chambers having confronting chamber walls displaced parallel with respect to each other. A first frame is fastened to one chamber wall and is joined by a resilient member to a second movable frame which can be brought into engagement with the other chamber wall. The movable frame is provided with at least one actuator by which it can be tightened against the confronting chamber wall.

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