Coupling for multiple masses in a micromachined device

Details Coupling for multiple masses in a micromachined device Coupling for multiple masses in a micromachined device

1995-06-06

1997-06-03

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7350412, 7351432, G01P 904

Patent

active

056356382

ABSTRACT:
A micromachined device has two suspended masses positioned near each other, each of the masses being dithered along a dither axis. Two couplings, each including an arcuate member and an anchored support beam, are provided between the masses to allow relative anti-phase movement and to resist relative in-phase movement. The coupling extends around a region intermediate the masses where a dither detection device is disposed.

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