Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Distributive type parameters
Reexamination Certificate
2001-05-25
2003-03-25
Le, N. (Department: 2858)
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Distributive type parameters
C074S424850
Reexamination Certificate
active
06538455
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The invention relates to a coupling; in particular, the invention relates to a coupling that can prevent a shaft of a reflectivity-measuring device from skidding.
2. Description of the Related Art
In the semiconductor manufacturing process, there is a process to electroplate a film on a wafer. After such a process is completed, a reflectivity-measuring device measures the thickness of the film.
Referring to
FIG. 1
, the reflectivity-measuring device
30
connects with a motor
20
by a coupling
10
. A first shaft
31
of the reflectivity-measuring device
30
and a second shaft
21
of the motor
20
are inserted into the coupling
10
separately. Therefore, the motor
20
drives the reflectivity-measuring device
30
through the coupling
10
in order to focus.
Referring to
FIG. 2
a
,
FIG. 2
b
and
FIG. 2
c
, the coupling
10
comprises a main portion
11
and plural screws
18
. A first hole
12
and a second hole
13
are formed on both end surfaces of the main portion
11
. The first hole
12
is used for the first shaft
31
inserting therein, and the second hole
13
is used for the second shaft
21
inserting therein. A first screw hole
14
and a second screw hole
15
are formed on the circumference surface of the main portion
11
. The first screw hole
14
and the second screw hole
15
are used for the screws
18
inserting therein. Furthermore, a first slot
16
, communicating with the first hole
12
and the first screw hole
14
, is formed on the main portion
11
. A second slot
17
, communicating with the second hole
13
and the second screw hole
15
, is formed on the main portion
11
. By means of the deposition of the first slot
16
and the second slot
17
, the first hole
12
and the second hole
13
have a larger space before the first shaft
31
and the second shaft
21
are inserted into the first hole
12
and the second hole
13
. After the first shaft
31
and the second shaft
21
are put in the first hole
12
and the second hole
13
separately, the screws
18
are screwed to the first screw hole
14
and the second screw hole
15
separately in order to decrease the gaps of the first slot
16
and the second slot
17
. As a result, the sizes of the first hole
12
and the second hole
13
become smaller, the first shaft
31
and the second shaft
21
are locked inside the main portion
11
.
However, since the diameters of the first shaft
31
and the second shaft
21
are extremely small, the screws
18
cannot lock the first shaft
31
and the second shaft
21
inside the main portion
11
completely. Furthermore, the output of the first shaft
31
is usually large, the skid between the first shaft
31
and the main portion
11
easily occurs. Hence, during the focus of the reflectivity-measuring device
30
, errors also easily occur.
SUMMARY OF THE INVENTION
In view of the disadvantages of the aforementioned conventional coupling, the invention provides a coupling that can prevent a shaft of a reflectivity-measuring device from skidding.
Accordingly, the invention provides a coupling for connecting a reflectivity-measuring device with a motor. The reflectivity-measuring device has a first shaft, and the motor has a second shaft. The coupling comprises a main portion having a first hole and a second hole. The first hole is used for the first shaft inserting therein, and the second hole is used for the second shaft inserting therein. The main portion further comprises a third hole, communicating with the first hole, and a first non-skid member, inserting into the third hole and abutting the first shaft located inside the first hole.
Furthermore, the main portion further comprises a fourth hole, communicating with the second hole, and a second non-skid member, inserting into the fourth hole and abutting the second shaft located inside the second hole.
Furthermore, the number of the third hole is not less than one, the number of the first non-skid member is not less than one, the number of the fourth hole is not less than one, and the number of the second non-skid member is not less than one.
Furthermore, the invention provides a coupling for a reflectivity-measuring device. The reflectivity-measuring device has a first shaft. The coupling comprises a main portion having a first hole. The first hole is used for the first shaft inserting therein. The main portion further comprises a third hole, communicating with the first hole, and a first non-skid member, inserted into the third hole and abutting the first shaft located inside the first hole.
REFERENCES:
patent: 5319991 (1994-06-01), Pierrat
patent: 6075299 (2000-06-01), Miyazaki et al.
Lin Hsien-Hsiang
Shieh Shiao-Ping
Shieh Thanku
Wu Wen-Chien
Kerveros James
Le N.
Mosel Vitelic Inc.
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