Coupled micromachined structure

Details Coupled micromachined structure Coupled micromachined structure

2006-01-03

2006-01-03

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504040, C073S514240

Reexamination Certificate

active

06981414

ABSTRACT:
A suspended, coupled micromachined structure including two proof masses and multiple support arms configured to suspend the masses above a substrate and a coupling spring element having two ends. Each end of the coupling spring element may be attached to a proof mass at a point between the proof masses. The frequency response characteristics of the proof masses may be improved.

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