Coupled FBAR filter

Details Coupled FBAR filter Coupled FBAR filter

2006-06-15

2008-08-05

Chang, Daniel D (Department: 2819)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S187000, C333S189000

Reexamination Certificate

active

07408429

ABSTRACT:
A coupled FBAR filter100includes first and second input/output vibration portions110and111respectively including first and second lower electrodes104and106, first and second upper electrodes105and107, and a piezoelectric thin film103interposed therebetween; and a cavity102for commonly guaranteeing vibrations of the first and second input/output vibration portions110and111so as to couple the vibrations. The first and second input/output vibration portions110and111are located adjacently in contact with each other with a step therebetween, such that the first and second lower electrodes104and106are not electrically connected to each other and such that the first and second upper electrodes105and107are not electrically connected to each other. Insulators108and109are provided in the vicinity of the step.

REFERENCES:
patent: 7053730 (2006-05-01), Park et al.
patent: 7233218 (2007-06-01), Park et al.
patent: 2006/0202769 (2006-09-01), Nagao et al.
patent: 10-145181 (1998-05-01), None
patent: 10-163804 (1998-06-01), None
patent: 2006/062082 (2006-06-01), None

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