Counterflow leak detector with cold trap

Measuring and testing – With fluid pressure – Leakage

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G01M 320

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active

044997523

ABSTRACT:
A counterflow helium mass spectrometer leak detector includes a test port for receiving a gas sample including the tracer gas helium, a high vacuum pump such as a diffusion pump and a mass spectrometer tuned to detect the helium. The mass spectrometer is coupled to the inlet of the high vacuum pump. The leak detector further includes a cold trap containing liquid nitrogen coupled between the test port and the foreline, or outlet port, of the high vacuum pump. The helium received at the test port passes in reverse, or counterflow, direction through the high vacuum pump to the mass spectrometer. One or more mechanical vacuum pumps insure that the pressure at the foreline of the high vacuum pump is maintained at a prescribed level during a leak test. The cold trap condenses contaminants, water vapor and other gases from the gas sample and prevents backstreaming of oil from mechanical vacuum pumps.

REFERENCES:
patent: 2504530 (1950-04-01), Jacobs
patent: 3342990 (1967-09-01), Barrington et al.
patent: 3416359 (1968-12-01), Durbin et al.
patent: 3520176 (1970-07-01), Becker
patent: 3626760 (1971-12-01), Briggs et al.
patent: 3645127 (1972-02-01), Mongodin et al.
patent: 3690151 (1972-09-01), Briggs
patent: 3968675 (1976-07-01), Briggs
Worthington, "New Developments in Trapless Leak Detection," Vacuum Technology Research/Development, Nov. 1976.
Introduction to Helium Mass Spectrometer Leak Detection, Varian Associates, Inc., 1980, pp. 26-45.
"New Dimensions in Leak Detection," Varian Brochure, Dec. 1982.

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