Counterflow device to reduce the negative impact of contaminatin

Details Counterflow device to reduce the negative impact of contaminatin Counterflow device to reduce the negative impact of contaminatin

1990-12-18

1993-03-30

Tung, T.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

20415322, 204400, 204409, 73 2901, 73 2902, G01N 2726

Patent

active

051980940

ABSTRACT:
A counterflow device adapted for an analyzer engaging a gas stream and having a sensor for measuring a component of that stream. Because at least one element disposed between the gas inlet and gas outlet of the sensor typically emits unwanted impurities, the device diverts a portion of the gas stream as a counterflow directed toward the impurity-emitting element or elements. The counterflow enters the outlet without contacting the sensor of the analyzer.

REFERENCES:
patent: 3050371 (1962-08-01), Dowson et al.
patent: 3234117 (1966-02-01), Rost et al.
patent: 4098650 (1978-07-01), Sayles
patent: 4800000 (1989-01-01), Zatko et al.
"Ultraclean Gas Delivery Systems-Part I" by K. Sugiyama and T. Ohmi in Microcontamination, Nov. 1988, pp. 49-54.
"Sub-ppb Analysis of Nitrogen Gas by APINS" by T. Kimura, J. Mettes and H. Schark, presented at Technical Symposium of Semicon East 89 in Boston, Massachusetts, Sep. 1989.

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