Corrugated waveguide for a microwave plasma applicator

Details Corrugated waveguide for a microwave plasma applicator Corrugated waveguide for a microwave plasma applicator

1995-06-28

1996-12-03

Gensler, Paul

Coating apparatus

Gas or vapor deposition

With treating means

31511141, 333242, 333 99PL, 118723MR, C23C 1600, H01J 724, H01P 323

Patent

active

055803873

ABSTRACT:
A corrugated waveguide is disclosed comprising a cylindrical body with outer and inner surfaces. The inner surface is provided with plurality of ridges uniformly spaced around the inner surface. Presence of 2n ridges secures the formation of microwaves with stable TE.sub.n1 modes where n is an integer and n>1. Disclosed also is an electron cyclotron resonance system for plasma processing of which system the corrugated waveguide described in the above is a part.

REFERENCES:
patent: 2199083 (1940-04-01), Schelkunoff
patent: 3289111 (1966-11-01), Carr
"Characterization of a New Electron Cyclotron Resonance Source Working with Permanent Magnets", by G. Neumann & K.-H. Kretschmer, J.Vac.Sci.Technol. B9(2) Mar./Apr. 1991 pp. 334-338.
"Distributed Electron Cyclotron Resonance in Silicon Processing: Epitaxy and Etching", by Rudolf R. Burke, J. Pelletier, C. Pomot, & L. Vallier, J.Vac.Sci.Technol.A8(3) May/Jun. '90.
"Electron Cyclotron Resonance Microwave Discharges for Etching and Thin-Film Deposition" by Jes Asmussen, J. Vac. Sci. Technol. A7(3), May/Jun. 1989, pp. 883-893.

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