Corrugated MEMS heater structure

Details Corrugated MEMS heater structure Corrugated MEMS heater structure

1998-07-10

2000-07-11

Paschall, Mark

Electric heating

Heating devices

With heating unit structure

219201, 219552, 251 11, 347 84, H05B 306, H05B 100, F16K 3100, B41J 217

Patent

active

060876387

ABSTRACT:
A thermal actuator comprising a first conductive material encased in a second non-conductive expansive material wherein said first conductive material is constructed in the form of a corrugated heater element so as to increase the rate of thermal transfer to said second non-conductive expansive material.

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patent: 5785295 (1998-07-01), Tsai
patent: 5810325 (1998-09-01), Carr
patent: 5838351 (1998-11-01), Weber

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