Corrosion resistant thin film thermocouples and method

Thermal measuring and testing – Temperature measurement – By electrical or magnetic heat sensor

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Details

1362361, 136238, 136225, G01K 702, H01L 3512

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active

052519813

ABSTRACT:
The invention relates to thermocouples which are formed from a junction of ruthenium oxide (RuO.sub.2) and iridium oxide (IrO.sub.2). The resulting thermocouple produces a typical electrical output of about 4.5 .mu.V/k at 40.degree. C. to about 4.1 .mu.v/K at 200.degree. C. The thermocouples are extremely resistant to corrosion and thus may be used for direct contact with corrosive environments such as halide containing acids, cyanides, chlorates or peroxides. Because the thermocouples can directly contact the environment, they are 100 to 1000 times faster than commercially available sheathed sensors.

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