Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent
1990-06-26
1992-07-21
Bennet, Henry A.
Heating
Work feeding, agitating, discharging or conveying...
Removable furnace bottom section or kiln cart
432 5, 432 6, 432 11, 432253, 118715, 118725, F27D 312, F27D 500, H05B 362, C23C 1600
Patent
active
051318423
ABSTRACT:
A thermal treating apparatus includes a reaction tube having an opening end and storing an object to be treated, an annular manifold arranged at the opening end and having an inlet for supplying a gas to the reaction tube and an outlet for exhausting the gas from the reaction tube, and a cover arranged on the opening end of the manifold. The surfaces of the annular manifold and the cover exposed to the inside of the reaction tube are covered by a material which is not corroded by the gas supplied to the reaction tube.
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Komino Mituaki
Miyagi Katushin
Miyazaki Shinji
Bennet Henry A.
Kabushiki Kaisha Toshiba
Kilner Christopher B.
Tokyo Electron Sagami Limited
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