Corrosion resistant molybdenum mask

Details Corrosion resistant molybdenum mask Corrosion resistant molybdenum mask

1997-01-30

1998-04-28

Zimmerman, John J.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including aperture

428472, B32B 1504, B32B 310

Patent

active

057442142

ABSTRACT:
A molybdenum mask for use in the sputter deposition of electrically conductive materials on preselected areas of a substrate is coated with a transition metal carbide. The carbide protects the metal images defined on the mask from degradation during mask cleaning and related processes, thereby dramatically extending the usable service life of the mask. The present invention overcomes the problem of reduced usable life of a molybdenum mask used in sputter coating and similar evaporative deposition processing.

REFERENCES:
patent: 4603056 (1986-07-01), MacKinnon et al.
patent: 4803110 (1989-02-01), Ahn et al.
patent: 5076147 (1991-12-01), Hegner et al.
patent: 5268068 (1993-12-01), Cowell et al.
"A High Resolution RIE Composite Mask," Research Disclosure, Mar. 1992, No. 335.

Affiliated with

Also associated with

Rating

Corrosion resistant molybdenum mask does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Corrosion resistant molybdenum mask, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Corrosion resistant molybdenum mask will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1530312