Corrosion-resistant member for chemical apparatus using halogen

Details Corrosion-resistant member for chemical apparatus using halogen Corrosion-resistant member for chemical apparatus using halogen

1992-03-26

1994-04-26

Reynolds, Bruce A.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

392416, 219553, 118725, H01L 21205

Patent

active

053068955

ABSTRACT:
An excellent corrosion resistant member of a ceramic heater for semiconductor production apparatuses to be exposed to a halogen series corrosive gas is provided. The corrosion resistant member uses one of an aluminum nitride and alumina sintered body as a substrate. A ceramic heater using the corrosion resistive member is also disclosed as well as a semiconductor heating device using the ceramic heater.

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Patent Abstracts of Japan, vol. 12, No. 398 (C-538)(3245) Oct. 21, 1988 & JP-A-63 140 085 (Kyocera Corp) Jun. 11, 1988.
Patent Abstracts of Japan, vol. 8, No. 247 (E-278)(1684) Nov. 13, 1984 & JP-A-59 124 140 (Fujitsu) Jul. 18, 1984.

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