Corrosion-resistant member and a producing process thereof

Details Corrosion-resistant member and a producing process thereof Corrosion-resistant member and a producing process thereof

1998-10-15

2000-09-12

Jones, Deborah

Stock material or miscellaneous articles

Composite

Of inorganic material

428213, 428218, 428220, 428446, 428450, B32B 1800

Patent

active

061175730

ABSTRACT:
A corrosion-resistant member includes a substrate made of a ceramic material and having a diameter of at least 200 mm, and a film of chemically vapor deposited silicon carbide having a thickness of not less than 0.5 mm and covering at least such a portion of the surface of the substrate that is to contact a corrosive material. A process is disclosed for producing such a corrosion-resistant member, which process includes thermally treating the film at a temperature higher, by not less than 50.degree. C. centigrade, than a film-forming temperature at which the film of silicon carbide is formed, after the formation of the silicon carbide film.

REFERENCES:
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patent: 4623517 (1986-11-01), Biolik et al.
patent: 4788018 (1988-11-01), Yamada et al.
patent: 5229193 (1993-07-01), Madono et al.
patent: 5683824 (1997-11-01), Kobayashi et al.
patent: 5853840 (1998-12-01), Saito et al.
"Chemical Vapor Deposition of Silicon Carbide For Large Area Mirrors", R.L. Gentilman et al.; Reflecting Optics for Synchrontron Radiation; Upton, New York; Nov. 16-18, 1981; vol. 315, pp. 131-134, XP002100557 ISSN 0277-786X; Proceedings of the SPIE-The International Society for Opitcal Engineering, 1981 *p. 133; figures 2,4; table 2*.
Patent Abstracts Of Japan; vol. 009, no. 049 (E-300); Mar. 2, 1985 & JP 59 189622 A (Toshiba Ceramics KK), Oct. 27, 1984 *abstract*.

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