Machine element or mechanism – Control lever and linkage systems – Multiple controlling elements for single controlled element
Reexamination Certificate
1999-05-19
2001-08-28
Bucci, David A. (Department: 3682)
Machine element or mechanism
Control lever and linkage systems
Multiple controlling elements for single controlled element
C901S049000
Reexamination Certificate
active
06279412
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates generally to the protection of robot arms exposed to corrosive atmospheres and, more particularly, to a system for congruently encapsulating the links of a multi-link robot arm with thin plastic corrosion resistant covers.
2. Description of the Prior Art
Some robots devices that handle semiconductor wafers are required work in atmospheric environments that contain highly corrosive fluids (gaseous or liquid). These robotic devices require protection from the corrosive agents to improve overall performance of the product. If corrosion occurs, the arm members can generate particles that can lead to failures on the wafers being handled. One solution to this problem is to use materials that resist corrosion (i.e. 300 series stainless steel or coatings). In the case of robotic linkages, some designers have fabricated the arm members out of electro-polished stainless steel to improve corrosion resistance or prevent corrosive from occurring. Other designers have sprayed coatings on the structural materials to help isolate the corrosive agents from interacting with the base structural material thereby minimizing corrosion. The issues associated with these two solutions are cost of the material, the uniformity of the coatings and the ability of the material to resist permeation of the corrosive agents.
It was with knowledge of the foregoing state of the technology that the present invention has been conceived and is now reduced to practice.
SUMMARY OF THE INVENTION
To solve the problem just related, the inventors have developed a technology to cover the arm links with thin plastic covers. These covers encapsulate each link of the robot arm enabling less expensive materials to be used for the structural members so the arm links without diminishing the operational capability of the robot arm. In another manner of speaking, a system is provided for shielding a robot arm against being splashed with fluids and comprises a protective shell-like cover of thin-walled plastic material impervious to fluids which is removably attached to the robot arm. The protective cover has a contoured shape congruently conforming to the configuration of the robot arm and includes an upper member overlying the upwardly facing surfaces of the robot arm and an integral continuous side member proximally overlying the sidewall of the robot arm and extending to a lower rim generally coplanar with the downwardly facing surfaces of the robot arm. The upper member of the protective cover generally overlies the upwardly facing surface of the robot arm while the peripherally extending sidewall generally overlies the outer facing surface of the peripherally extending sidewall. In similar fashion, a protective plate of thin-walled plastic material impervious to fluids may also be removably attached to the downwardly facing surfaces of the robot arm and includes a peripheral rim generally coextensive with the peripherally extending sidewall of the link and proximate the lower rim of the protective cover when both the protective cover and the protective plate are so attached. With this construction, any splashing issuing from any direction and directed toward the robot arm is caused to impinge upon the protective cover and the protective plate thereby protecting the link of the robot arm to which it is attached.
A primary feature, then, of the present invention is the provision of a system for the protection of robot arms exposed to corrosive atmospheres.
Another feature of the present invention is the provision of such a system according to which the links of a multi-link robot arm are congruently encapsulated with thin plastic corrosion resistant covers.
Still another feature of the present invention is the provision of such a system using such thin plastic corrosion resistant covers which are disposable and easily replaced.
Yet another feature of the present invention is the provision of such a system which utilizes such thin plastic corrosion resistance covers which are inexpensive to manufacture, install, and replace.
Other and further features, advantages, and benefits of the invention will become apparent in the following description taken in conjunction with the following drawings. It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory but are not to be restrictive of the invention. The accompanying drawings which are incorporated in and constitute a part of this invention, illustrate one of the embodiments of the invention, and together with the description, serve to explain the principles of the invention in general terms. Like numerals refer to like parts throughout the disclosure.
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Beaulieu David R.
Caveney Robert T.
Ha Tuan
Brooks Automation Inc.
Bucci David A.
Joyce William C
Perman & Green LLP
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