Corrosion resistant cryopump

Details Corrosion resistant cryopump Corrosion resistant cryopump

1996-09-05

1998-09-01

Kilner, Christopher

Refrigeration

Low pressure cold trap process and apparatus

417901, B01D 800

Patent

active

057994935

ABSTRACT:
A cryopanel is formed of aluminum to avoid copper ions in a work chamber, and the aluminum is coated with a Teflon.RTM. polymer for corrosion resistance. A corrosion resistant thermally conductive link is obtained by surrounding indium with a polymer coated C-ring. The cryopanel is shaped as a trough to enable draining of liquid during regeneration.

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