Corpuscular beam control circuit arrangement

Details Corpuscular beam control circuit arrangement Corpuscular beam control circuit arrangement

1982-07-29

1984-08-28

Smith, Alfred E.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

H01J 37302

Patent

active

044685661

ABSTRACT:
The invention relates to a digital circuit arrangement for control of a corpuscular beam in the procedure of structurizing areas by use of corpuscular irradiation devices operating with linearly extended multi-deflection systems, particularly for use in microlithography, constituted of a plurality of like circuit members for producing columns which contain figure edge points, each member including three triggers for storing edge course control signals indicative of the edge course, the three triggers output signals are combined in antivalence in the respective circuit member to yield an edge point signal. Furthermore, the circuit members are combined in a columnwise member arrangement in which the triggers form shift registers for a positive and negative shift direction. The complete bit pattern columns are generated in a logic circuit arrangement connected to the member arrangement hierarchically setup of antivalence gates from the outputs of which bright/dark control signals are derived for the multi-deflection system.

REFERENCES:
patent: 4051381 (1977-09-01), Trotel
patent: 4119857 (1978-10-01), Desperques-Volmier

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