Radiant energy – Ion generation – Field ionization type
Reexamination Certificate
2007-04-03
2007-04-03
Wells, Nikita (Department: 2881)
Radiant energy
Ion generation
Field ionization type
C250S424000, C250S325000, C313S231710, C315S111810, C315S111910
Reexamination Certificate
active
11215759
ABSTRACT:
Excimers are formed in a gas (30,130) by applying a pulsed potential between a first electrode (14,114) and a counter electrode (26, 126) so that corona discharge occurs, substantially without arcing, when the potential is on. The pulses or on-times of the potential desirably are about 100 microseconds or less. Use of a pulsed potential provides greater efficiency than a constant potential. Where the excimer-forming gas is a pure inert gas, the gas desirably contains less than 10 ppm water vapor.
REFERENCES:
patent: 6400089 (2002-06-01), Salvermoser et al.
Salvermoser, M. and D. E. Murnick, “Efficient, stable, corona discharge 172 nm xenon excimer light source,” J. Applied Physics, vol. 94, No. 6, Sep. 15, 2003, pp. 3722-3731.
Murnick Daniel E.
Salvermoser Manfred
Lerner David Littenberg Krumholz & Mentlik LLP
Rutgers The State University
Wells Nikita
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