Corona charging for testing reliability of insulator-covered sem

Details Corona charging for testing reliability of insulator-covered sem Corona charging for testing reliability of insulator-covered sem

1980-01-10

1982-04-20

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158D, G01R 3126

Patent

active

043261655

ABSTRACT:
A method for predicting certain electrical failures in a semiconductor device after long-term operation, includes the steps of measuring a predetermined parameter of the semiconductor device before and after it is exposed to a corona discharge and then comparing the two measurements.

REFERENCES:
patent: 4220918 (1980-09-01), Pepper
Woods et al; "Injection and Removal . . . "; J. Appl. Phys.; vol. 44; No. 12; Dec. 1973; pp. 5506-5510.
Williams et al; "Mobile Fluoride Ions in SiO.sub.2 "; J. Appl. Phys.; vol. 46; No. 2; Feb. 1975; pp. 695-698.
Weinberg, Z. A.; "Hole Injection . . . "; Appl. Phys. Letters; vol. 27; No. 8; Oct. 15, 1975; pp. 437-439.
Grove; "Physics and Technology of Semiconductor Devices"; John Wiley & Sons, New York, N.Y.; 1967; pp. 303-304.
Wu et al; "Charge Phenomena . . . "; J. Appl. Phys.; vol. 39; No. 12; Nov. 1968; pp. 5613-5618.

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