Corner cube retroreflector

Details Corner cube retroreflector Corner cube retroreflector

2007-04-10

2007-04-10

Cherry, Euncha P. (Department: 2872)

Optical: systems and elements

Signal reflector

3-corner retroreflective

Reexamination Certificate

active

10710983

ABSTRACT:
The present invention includes a novel method to fabricate corner cube retroreflectors, CCRs, where a majority of the wafer area acts as CCRs as compared to a maximum of 33% in previous MEMS CCRs. The present invention also allows for the fabrication of moveable cantilevers which operate at one-third the voltage as compared to a conventional planar cantilever.

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Patrick B. Chu et al., Optical Communication Using Micro Corner Cube Reflectors, IEEE, 1997.
V.S. Hsu et al., MEMS Corner Cube Retroreflectors for Free-Space Optical Communications, University of California Publication, Nov. 1999, pp. 1-53.
Lixia Zhou et al., Assembled Corner-Cube Retroreflector Quadruplet, IEEE, 2002, pp. 556-559.
Lixia Zhou et al., Corner-Cube Retroreflectors Based on Structure-Assisted Assembly for . . . , Journal of Microelectromechanical Systems, 2003, 12(3), pp. 233-242.
Xiaoming Zhu et al., Optical Modeling of MEMS Corner Cube Retroreflectors with Misalignment and Nonflatness, IEEE Journal on Quantum Electronics, 2002, 8(1), pp. 26-32.
Corner Cube Retro-Reflectors, Corner Cube Prisms, www.optical-components.com/corner-cube-retroreflector.html, Red Optronics, 2003.

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