Abrasive tool making process – material – or composition – With inorganic material
Reexamination Certificate
2011-06-21
2011-06-21
Green, Anthony J (Department: 1731)
Abrasive tool making process, material, or composition
With inorganic material
C106S003000
Reexamination Certificate
active
07964005
ABSTRACT:
A composition that rapidly passivates copper-containing surface to yield a uniform layer of insoluble copper oxide, the composition being useful in chemical-mechanical planarization of copper-containing surfaces is disclosed. The composition is a solution having a pH of equal to or greater than 9 and having an oxidation potential sufficient to oxidize the surface to form non-soluble copper oxides. Also disclosed are methods of making and using the composition.
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Abelev Esta
Ein-Eli Yair
Rabkin Eugene
Starosvetsky David
Green Anthony J
Parvini Pegah
Technion Research & Development Foundation Ltd.
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