Copolymers having o-nitrocarbinol ester groups, production of tw

Details Copolymers having o-nitrocarbinol ester groups, production of tw Copolymers having o-nitrocarbinol ester groups, production of tw

1988-01-12

1989-02-28

Michl, Paul R.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

526311, 430270, 430281, 430285, 430286, 430311, 430313, 430314, 156643, C08F 2036, G03C 170

Patent

active

048086827

ABSTRACT:
Copolymers useful in particular for producing two-layer resists and fabricating semiconductor devices contain from 5 to 50 mol % of monomers having o-nitrocarbinol ester groups, from 95 to 50 mol % of an olefinically unsaturated silicon-containing organic compound, from 0 to 20 mol % of an olefinically unsaturated carboxylic acid and from 0 to 25 mol % of other copolymerizable monomers.

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S. A. MacDonald, Microelectronic Engineering 1, pp. 269-293, 1983.
M. Suzuki, Journal of the Electrochemical Society, vol. 130, pp. 1962-1964, 1983.
F. Buiguez, Microcircuit Engineering 1984, A. Heuberger, H. Beneking, Eds., Academic Press, 1985, pp. 471-481.
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