Copolymers having O-nitrocarbinol ester groups and production of

Details Copolymers having O-nitrocarbinol ester groups and production of Copolymers having O-nitrocarbinol ester groups and production of

1988-01-12

1989-04-18

Michl, Paul R.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

430270, 430326, 526263, G03C 170

Patent

active

048228664

ABSTRACT:
Copolymers containing from 5 to 50 mol % of monomers having o-nitrocarbinol ester groups, from 94 to 30 mol % of methacrylonitrile, from 1 to 20 mol % of olefinically unsaturated copolymerizable carboxylic acid and from 0 to 30 mol % of other copolymerizable monomers as copolymerized units are useful for fabricating semiconductor components.

REFERENCES:
patent: 3926636 (1975-12-01), Barzynski
patent: 4389482 (1983-06-01), Bargon et al.
patent: 4456679 (1984-06-01), Leyrer
patent: 4465760 (1984-08-01), Leyrer
patent: 4565771 (1986-01-01), Lynch
patent: 4576902 (1986-03-01), Saenger
patent: 4579806 (1986-04-01), Schupp
patent: 4596759 (1986-06-01), Schupp
patent: 4632900 (1986-12-01), Demmer
State of Art of Acrylate Resists: An Overflow of Polymer Structure and Lithographic Performance-Moreau-Optical Engineering/Mar./Apr. 1983, vol. 22, No. 2-pp. 181-184.
Structural Composition of Polymers Relative to Their Plasma Etch Characteristics-Pederson-J. Electrochem.Soc:Solid-State Science and Technology-Jan. 1982, pp. 205-208.
Dry Etching Durability of Positive Electron Resists-Harada-Journal of Applied Polymer Science, vol. 26, pp. 3395-3408-1981.
Mathematical Modeling of the Lithium-Aluminum, Iron Sulfide Battery Pollard & Newman-Journal of the Electrochemical Society, vol. 128, No. 3, Mar. 1981-pp. 491-502.
Effect of Composition on Resist Dry-Etching Susceptibility-Helbert & Schmidt Polymer Materials for Electronic Applications-pp. 61-72.
Effect of Composition on Resist Dry Etching Susceptibility-Herbert, Schmidt & Malkiewicz-Polymers in Electronics-pp. 91-100.

Affiliated with

Also associated with

Rating

Copolymers having O-nitrocarbinol ester groups and production of does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Copolymers having O-nitrocarbinol ester groups and production of, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Copolymers having O-nitrocarbinol ester groups and production of will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2397605