Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...
Patent
1986-02-18
1988-01-19
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Diazo reproduction, process, composition, or product
Composition or product which contains radiation sensitive...
430270, 430326, 430330, G03C 160, G03C 1495
Patent
active
047204451
ABSTRACT:
A novel positive photoresist formulation is provided based on a 1:1 copolymer of maleimide and an aliphatic vinyl ether or ester in combination with a photoactive sensitizer capable of undergoing a change in aqueous alkaline solubility upon exposure to actinic radiation. The copolymers disclosed have structures of the following type: ##STR1## where R is an alkyl substituent of from 1 to 20 carbon atoms, benzyl, C.sub.1 to C.sub.10 aralkyl, C.sub.3 to C.sub.12 cycloalkyl or ##STR2## where R" has the structures assigned to R, and where R' is independently H, C.sub.1 to C.sub.10 alkyl, phenyl, benzyl or C.sub.1 to C.sub.10 aralkyl. The polymers are compounded with a photoactive sensitizer capable of undergoing a change in aqueous alkaline solubility upon exposure to actinic radiation such as with diazonaphthoquinone sulfonic acid esters and amides. The polymer and sensitizer compositions are dissolved together in a solvent useful for spin casting of thin films on substrates.
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Brahim Karime
McFarland Michael J.
Allied Corporation
Bowers Jr. Charles L.
Friedenson Jay P.
Wells Harold N.
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