Copolymers containing N-vinyllactam derivatives, preparation met

Details Copolymers containing N-vinyllactam derivatives, preparation met Copolymers containing N-vinyllactam derivatives, preparation met

1997-03-13

2000-04-18

Truong, Duc

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From carboxylic acid or derivative thereof

5255269, 540200, 540354, 540358, 540252, 540463, 540451, 540485, 540487, 540524, 540525, 540326, 540531, 546 14, 546 21, 546243, 548111, 548544, 548545, 548557, 4302811, C08G 6914, C08F 2610

Patent

active

06051678&

ABSTRACT:
Copolymers containing N-vinyllactam derivatives protected at 3-position are provided and represented by the following formula. The copolymers are used as a photoresist material suitable for deep uv process so that high sensitivity and resolution can be obtained. In addition, ultrafine circuits can be formed and an exceptional improvement in PED stability can be accomplished by use of the photoresist. ##STR1##

REFERENCES:
patent: 4164614 (1979-08-01), Ames
patent: 4456741 (1984-06-01), Ames
patent: 4491628 (1985-01-01), Ito et al.
patent: 5750680 (1998-05-01), Kim et al.

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