Copolymer of sulfur dioxide and nuclear-substituted trialkylgerm

Details Copolymer of sulfur dioxide and nuclear-substituted trialkylgerm Copolymer of sulfur dioxide and nuclear-substituted trialkylgerm

1992-03-12

1994-05-24

Anderson, Harold D.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From heavy metal or aluminum reactant having at least one...

528382, 528386, 528392, C08G 7522, C08G 7900

Patent

active

053149785

ABSTRACT:
Copolymers comprising 1-50 mole % of sulfur dioxide and 50-99 mole % of trialkylgermylstyrene, having a weight average molecular weight of 500-10,000,000 and exhibiting a high sensitivity to light, electron beam, and X-ray, as well as having an excellent anti-dry etching resistance, and their application as a positive resisting material.

REFERENCES:
patent: 4965340 (1990-10-01), Matsuda et al.
M. J. Bowden and L. F. Thompson, J. Electrochem. Soc., 120, 1722, 1973.
M. J. Bowden and L. F. Thompson, J. Electrochem. Soc., 121, 1620, 1974.

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