Copolymer from sulfur dioxide and vinyl compound

Details Copolymer from sulfur dioxide and vinyl compound Copolymer from sulfur dioxide and vinyl compound

1989-01-17

1990-10-23

Anderson, Harold D.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From sulfur-containing reactant

1566591, 528 25, 528 26, 528 29, 528 32, C08G 7500

Patent

active

049653407

ABSTRACT:
A novel copolymer useful as an active ingredient for a positive type resist material to be decomposed by electron beam or X-rays with a high sensitivity and having a superior resistance to dry etching, a process for producing the copolymer and a resist material containing the copolymer are provided, which copolymer consists of 1 to 50% by mol of structural units of ##STR1## and 50 to 99% by mol of structural units of one or more vinyl compounds at least one of which is an aromatic ring-containing vinyl compound and having a number average molecular weight of 500 to 500,000.

REFERENCES:
patent: 3890287 (1975-06-01), Moore et al.

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