Coordinated X-Y stage apparatus

Details Coordinated X-Y stage apparatus Coordinated X-Y stage apparatus

1999-04-28

2000-01-25

Fulton, Christopher W.

Geometrical instruments

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33 255, 7447901, G09B 2332, G05G 1100

Patent

active

06016607&

ABSTRACT:
An apparatus based on precision X-Y stages that are stacked. Attached to arms projecting from each X-Y stage are a set of two axis gimbals. Attached to the gimbals is a rod, which provides motion along the axis of the rod and rotation around its axis. A dual-planar apparatus that provides six degrees of freedom of motion precise to within microns of motion.

REFERENCES:
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patent: 4565094 (1986-01-01), Sedgewick
patent: 4756655 (1988-07-01), Jameson
patent: 4787148 (1988-11-01), Myer
patent: 4956923 (1990-09-01), Pettingell et al.
patent: 5216932 (1993-06-01), Takei
patent: 5303035 (1994-04-01), Luecke et al.
patent: 5918507 (1999-07-01), Yoneyama

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