Geometrical instruments – Gauge – Coordinate movable probe or machine
Patent
1989-12-11
1991-07-16
Cuchlinski, Jr., William A.
Geometrical instruments
Gauge
Coordinate movable probe or machine
33 1M, 33702, G01B 503
Patent
active
050313312
ABSTRACT:
A coordinate measuring apparatus includes guides made of aluminum. Scales which are also made of aluminum are used to measure the position of the measuring slide movable on the guides. In a preferred embodiment, the scales are in the form of a reflection phase grating and are applied directly to the surface of the guide member. In addition, a temperature sensor is provided which measures the temperature of the guide member and of the scale divisions. A method of producing the scale divisions is also disclosed.
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Herzog Klaus
hnelt Peter
Schepperle Karl
Seitz Karl
Carl-Zeiss-Stiftung
Cuchlinski Jr. William A.
Dowling William C.
Ottesen Walter
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