Cooling system for semiconductor process

Details Cooling system for semiconductor process Cooling system for semiconductor process

1997-01-30

1998-01-06

Nguyen, Kiet T.

Radiant energy

Irradiation of objects or material

250504R, B05D 306

Patent

active

057058229

ABSTRACT:
A cooling system for use in a UV curing apparatus is disclosed. The cooling system includes a UV curing apparatus and a water supply element connected to the UV curing apparatus for cooling the curing apparatus via a first solenoid valve. A CPU is responsive to the UV curing apparatus for controlling the status of the first solenoid valve. An inverter is connected to the CPU and its output is coupled to a second solenoid valve. The second solenoid valve connects an air purging element to the curing apparatus. The air purging element provides clean dry air to force the water out of the curing apparatus.

REFERENCES:
patent: 4864145 (1989-09-01), Burgio, Jr.

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