Cooling system for a horizontal diffusion furnace

Electric heating – Heating devices – Combined with container – enclosure – or support for material...

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Details

219400, F27B 514

Patent

active

054810884

ABSTRACT:
Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.

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