Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1994-04-21
1996-01-02
Hoang, Tu
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
219400, F27B 514
Patent
active
054810884
ABSTRACT:
Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.
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Erickson Ronald E.
Matthews Stephen H.
Peck Kevin B.
Hoang Tu
Thermtec, Inc.
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