Drying and gas or vapor contact with solids – Apparatus – For diverse operations on treated material
Patent
1997-08-29
1999-11-02
Bennett, Henry
Drying and gas or vapor contact with solids
Apparatus
For diverse operations on treated material
118724, 34 62, 34428, F26B 1900
Patent
active
059746823
ABSTRACT:
The process system of the present invention has a cooling process portion, a siding portion, and transfer means. The cooling process portion is responsible for applying cooling process to a heated substrate. The siding portion is positioned in an upper side of the cooling process portion and used for temporarily storing the substrate before being subjected to the cooling process. The transfer means loads/unloads the substrate into/from the cooling process portion and the siding portion.
REFERENCES:
patent: 5879461 (1999-03-01), Adams
Bennett Henry
Tokyo Electron Limited
Wilson Pamela A.
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