Cooling of voice coil motors

Details Cooling of voice coil motors Cooling of voice coil motors

2006-06-06

2006-06-06

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

Reexamination Certificate

active

07057313

ABSTRACT:
A voice coil motor used, for example, in a positioning device associated with either a first object table or a second object table in which the coil is cooled with a cooling jacket in thermal contact with the coil, the cooling jacket comprising at least one channel for circulation of a cooling fluid, the or each channel being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil, for use, for example, in a lithographic projection apparatus including a radiation system for supplying a projection beam of radiation, a first object table for holding a mask, a second object table for holding a substrate, a projection system for imaging irradiated portions of the mask onto target portions of the substrate. The cooling jacket may be formed of a ceramic material and may be of a monolithic construction.

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