Cooling mechanism

Details Cooling mechanism Cooling mechanism

2006-09-12

2006-09-12

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000

Reexamination Certificate

active

07106413

ABSTRACT:
A cooling mechanism for cooling an optical element disposed in a vacuum atmosphere includes a support part for supporting the optical element, which has a channel having an inlet, into which gas is supplied, and an outlet, from which the gas is exhausted, and a decompression mechanism, connected to the channel, for reducing pressure of the gas to be supplied.

REFERENCES:
patent: 4720732 (1988-01-01), Tsutsui
patent: 5220171 (1993-06-01), Hara et al.
patent: 2001/0016302 (2001-08-01), Hirayanagi et al.
patent: 2003/0179377 (2003-09-01), Masaki et al.
patent: 2004/0130688 (2004-07-01), Emoto

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