Wave transmission lines and networks – Coupling networks – With impedance matching
Patent
1989-12-28
1991-09-17
Gensler, Paul
Wave transmission lines and networks
Coupling networks
With impedance matching
333 22F, 336 62, H03H 738, H03H 100
Patent
active
050498401
ABSTRACT:
The invention relates to a cooling device for circuit configurations in which high electrical energies are converted and specifically for electrical matching circuits with which the impedance of a plasma path is matched to a high frequency generator. Herein one or several coils are provided with a water cooling system in such a way that the cooling water is completely separated from the electromagnetic fields through metallic material. These coils consist of two tubes slid one into the other, wherein the cooling water is fed and drawn through the internal tube and between the two tubes so that it is completely within the field-free region.
REFERENCES:
patent: 1753408 (1930-04-01), Gebhard
patent: 1817247 (1931-08-01), Gebhard
patent: 1882075 (1932-10-01), Gebhard
patent: 4207137 (1980-06-01), Tretola
Gesche Roland
Locher Stefan
Gensler Paul
Leybold Aktiengesellschaft
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