Cooling device and cooling method

Details Cooling device and cooling method Cooling device and cooling method

2005-05-10

2005-05-10

Ford, John K. (Department: 3753)

Heat exchange

With timer, programmer, time delay, or condition responsive...

Having heating and cooling capability

C165S264000, C165S080400, C165S080500, C165S259000, C165S205000, C165S206000, C062S099000, C062S185000, C062S434000, C062S435000

Reexamination Certificate

active

06889764

ABSTRACT:
A cooling device for cooling an object to be processed to a target temperature comprises a plurality of contact members mounted on a placing table, for supporting the object such that the object opposes a top surface of the placing table with an interval, temperature sensors for outputting temperature information of the object supported by the contact members, a first cooling unit for cooling the placing table to a temperature lower than the target temperature to cool the object, a second cooling unit for heating the object cooled by the first cooling unit to a temperature almost equal to the target temperature, and a contrast circuit for performing a switching operation between cooling by the first cooling unit and heating by the second cooling unit on the basis of the temperature information from the temperature sensors.

REFERENCES:
patent: 3525098 (1970-08-01), Vox
patent: 3735805 (1973-05-01), Stillherd
patent: 5601141 (1997-02-01), Gordon et al.
patent: 5941083 (1999-08-01), Sada et al.
patent: 6-2262 (1994-01-01), None
patent: 8-63236 (1996-03-01), None

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