Cooling device and cooling method

Details Cooling device and cooling method Cooling device and cooling method

1996-01-18

1999-08-24

Ford, John K.

Refrigeration

Processes

Fluid external of refrigeration producing cycle

62185, 62434, 62435, 165263, 165264, 165259, 165 804, 165 805, 165206, F25B 2900, H01L 2100, G05D 2300

Patent

active

059410833

ABSTRACT:
A cooling device for cooling an object to be processed to a target temperature comprises a plurality of contact members mounted on a placing table, for supporting the object such that the object opposes a top surface of the placing table with an interval, temperature sensors for outputting temperature information of the object supported by the contact members, a first cooling unit for cooling the placing table to a temperature lower than the target temperature to cool the object, a second cooling unit for heating the object cooled by the first cooling unit to a temperature almost equal to the target temperature, and a contrast circuit for performing a switching operation between cooling by the first cooling unit and heating by the second cooling unit on the basis of the temperature information from the temperature sensors.

REFERENCES:
patent: 3525098 (1970-08-01), Vox
patent: 3735805 (1973-05-01), Stillhard
patent: 5601141 (1997-02-01), Gordon et al.

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