Cooling apparatus, cooling method, and processing apparatus

Details Cooling apparatus, cooling method, and processing apparatus Cooling apparatus, cooling method, and processing apparatus

1998-02-13

1999-08-31

Bennett, Henry

Refrigeration

Intermediate fluid container transferring heat to heat...

Flow line connected transfer fluid supply and heat exchanger

62314, 62 481, 62 521, 62304, 34 75, 34 76, 34 77, 34 78, 34517, 34518, 34516, F25D 1702

Patent

active

059438800

ABSTRACT:
A refrigerant is directly contacted to a substrate to be processed that was heated so as to quickly cool the substrate. Thus, the temperature of the substrate is dropped to a predetermined temperature level. The substrate is cooled by a cooling device and cooling water. Thus, the cooling temperature can be accurately controlled. In addition, the substrate can be effectively cooled.

REFERENCES:
patent: 4597736 (1986-07-01), Moffat
patent: 4667478 (1987-05-01), Jones, III
patent: 4878353 (1989-11-01), Gibot et al.
patent: 4934151 (1990-06-01), Shima
patent: 5315834 (1994-05-01), Garunts et al.
patent: 5551165 (1996-09-01), Turner et al.

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