Refrigeration – Structural installation – With electrical component cooling
Reexamination Certificate
2006-02-21
2006-02-21
Jones, Melvin (Department: 3744)
Refrigeration
Structural installation
With electrical component cooling
C062S117000, C062S185000, C062S498000, C062S434000, C062S003100, C062S003200, C062S003700, C219S120000, C361S688000, C361S689000, C165S104190
Reexamination Certificate
active
07000416
ABSTRACT:
a cooling apparatus110comprises a primary refrigerant circulating circuit which allows a primary refrigerant CW1whose temperature is adjusted by a heat exchanger138to circulate through an electrode to adjust a temperature of the electrode, a secondary refrigerant circulating circuit which supplies a secondary refrigerant CW2to the heat exchanger to adjust the temperature of the primary refrigerant, and a freezing circuit140which has a first heat exchanger141interposed in the secondary refrigerant circulating circuit and which adjust a temperature of the secondary refrigerant by a tertiary refrigerant. The temperature of the primary refrigerant is adjusted by the secondary refrigerant without adjusting the temperature using the freezing circuit. When a temperature of the primary refrigerant is set higher than that of the secondary refrigerant, the temperature of the primary refrigerant can be adjusted only by the secondary refrigerant. Only when the temperature of the primary refrigerant is set lower than that of the secondary refrigerant, the temperature of the secondary refrigerant is adjusted by the freezing circuit and thus, it is possible to save energy.
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Furuya Masao
Hirooka Takaaki
Finnegan Henderson Farabow Garrett & Dunner LLP
Jones Melvin
Tokyo Electron Limited
Zec Filip
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