Cooling apparatus and method, and exposure apparatus having...

Details Cooling apparatus and method, and exposure apparatus having... Cooling apparatus and method, and exposure apparatus having...

2007-03-20

2007-03-20

Ali, Mohammad M. (Department: 3744)

Refrigeration

Using electrical or magnetic effect

Thermoelectric; e.g., peltier effect

Reexamination Certificate

active

10631927

ABSTRACT:
A cooling apparatus for cooling an optical element provided in a vacuum atmosphere includes a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer, and a controller for controlling temperature of the radiation cooling part.

REFERENCES:
patent: 3212274 (1965-10-01), Eidus
patent: 4505118 (1985-03-01), Altman
patent: 5813233 (1998-09-01), Okuda et al.
patent: 6000227 (1999-12-01), Kroeker
patent: 6098408 (2000-08-01), Levinson et al.
patent: 6298669 (2001-10-01), Maruyama et al.
patent: 6326610 (2001-12-01), Muramatsu et al.
patent: 6509951 (2003-01-01), Loopstra et al.
patent: 6939899 (2005-09-01), Buazza et al.
patent: 6992306 (2006-01-01), Honda et al.
patent: 7068348 (2006-06-01), Hara
patent: 2003/0035088 (2003-02-01), Emoto
patent: 2003-058258 (2003-02-01), None
patent: 2004-029314 (2004-01-01), None
patent: 2004-039696 (2004-02-01), None

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