Cooling apparatus

Details Cooling apparatus Cooling apparatus

2006-12-05

2006-12-05

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S067000, C355S071000, C250S492100, C378S034000

Reexamination Certificate

active

07145632

ABSTRACT:
A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.

REFERENCES:
patent: 6594334 (2003-07-01), Ota
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 2004/0051984 (2004-03-01), Oshino et al.
patent: 2005/0073663 (2005-04-01), Miyajima
patent: 2005/0122490 (2005-06-01), Luttikhuis et al.

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