Cooled window for X-rays or charged particles

Details Cooled window for X-rays or charged particles Cooled window for X-rays or charged particles

1994-09-06

1996-04-16

Porta, David P.

X-ray or gamma ray systems or devices

Beam control

Window

2505051, G02B 500

Patent

active

055090460

ABSTRACT:
A window that provides good structural integrity and a very high capacity for removal of the heat deposited by x-rays, electrons, or ions, with minimum attenuation of the desired beam. The window is cooled by providing microchannels therein through which a coolant is pumped. For example, the window may be made of silicon with etched microchannels therein and covered by a silicon member. A window made of silicon with a total thickness of 520 .mu.m transmits 96% of the x-rays at an energy of 60 keV, and the transmission is higher than 90% for higher energy photons.

REFERENCES:
patent: 5075797 (1991-12-01), Jones
patent: 5128977 (1992-07-01), Danos

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