Cooled plasma source

Details Cooled plasma source Cooled plasma source

1992-02-10

1993-10-26

DeMeo, Palmer C.

Electric lamp and discharge devices

With temperature modifier

Hollow electrode or lead

313 32, 313 33, 31323141, 3133601, 3133621, H05H 128, H05H 154, H01J 724

Patent

active

052569306

ABSTRACT:
A cooled plasma source for producing ions by electrical discharge. A cooled plate is positioned in the chamber of the plasma source for blocking thermal radiation from an electron-emitting cathode. The presence of the cooled plate results in significantly decreased substrate temperatures, as compared to use of conventional plasma source apparatus. As a result, the cooled plasma source may be used for treatment of heat-sensitive plastic substrates.

REFERENCES:
patent: 3408283 (1968-10-01), Chopra et al.
patent: 4272699 (1981-06-01), Faubel et al.
"Broad-Beam Ion Sources," Review of Scientific Instruments vol. 61, pp. 230-235, Jan. 1990.
Characteristics, Capabilities and Applications of Broad-Beam Ion Sources, Commonwealth Scientific Corporation, Alexandria, BA, pp. 9-10 (1987).
"High Performance, Low Energy Ion Source," IEE Transactions on Plasma Science, vol. PS-6, No. 4, pp. 535-538, Dec. 1978.

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