Cooled backing plate for a sputtering target, and sputtering...

Details Cooled backing plate for a sputtering target, and sputtering... Cooled backing plate for a sputtering target, and sputtering...

2011-06-14

2011-06-14

Nguyen, Nam X (Department: 1724)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C204S298070

Reexamination Certificate

active

07959776

ABSTRACT:
Claimed is a sputtering target system comprising a plurality of backing plates to be individually cooled. Each backing plate is provided on its back side with a meandering groove that is closed off by a sealing plate. The sealing plate is welded around its circumference to the backing plate and at the same time is welded to at least one ridge located at a distance from the frame, which separates two grooved sections from one another. The sealing plate thus welded to the backing plate not only closes off the grooves to form a cooling channel, but also is used for reinforcement of the otherwise relatively flat backing plate.

REFERENCES:
patent: 5096536 (1992-03-01), Cathey, Jr.
patent: 5096562 (1992-03-01), Boozenny et al.
patent: 5433835 (1995-07-01), Demaray et al.
patent: 5487822 (1996-01-01), Demaray et al.
patent: 5873989 (1999-02-01), Hughes et al.
patent: 6113754 (2000-09-01), Oh et al.
patent: 6199259 (2001-03-01), Demaray et al.
patent: 6340415 (2002-01-01), Raaijmakers et al.
patent: 6494999 (2002-12-01), Herrera et al.
patent: 2002/0100680 (2002-08-01), Yamamoto et al.
patent: 19916938 (2000-10-01), None
patent: 10058769 (2002-08-01), None
patent: 1659193 (2004-11-01), None
patent: 2573441 (1986-05-01), None
patent: 60110873 (1985-06-01), None
patent: 62077461 (1987-04-01), None
patent: 3140464 (1991-06-01), None
patent: 5132774 (1993-05-01), None

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