Conveyor mechanism for thin plate

Details Conveyor mechanism for thin plate Conveyor mechanism for thin plate

1984-04-04

1986-05-06

Tudor, Harold J.

Conveyors: power-driven

Conveyor section

Reciprocating conveying surface

198621, 414221, B65G 2500

Patent

active

H00000671

ABSTRACT:
A conveyor mechanism suitable for a thin plate, especially for uniformly drying a photoresist coated on a wafer without smearing its rear surface with the photoresist has at least four grooves formed laterally in the upper surface of a table, two of the grooves extending from one side of the table and the other two from the opposite side. A movable frame is provided with its legs located outside the sides of the table. The legs are each provided with two fingers, the inner ends of which are allowed to downwardly enter the grooves so as to mount the thin plate on the table. They are kept aside while the thin plate is treated on the table. After completion of the treatment, the fingers are swung back into the grooves and are then moved upwards, thereby lifting the thus-treated thin plate from the table. Then, the frame is caused to move so that the thin plate is carried away.

REFERENCES:
patent: 3198309 (1965-08-01), Ogawa
patent: 3834213 (1974-09-01), Henzler et al.
patent: 3885680 (1975-05-01), Rasenberger
patent: 4273507 (1981-06-01), Herdzina et al.
patent: 4465416 (1984-08-01), Burkhalter et al.

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