Conveyor means for wafers

Details Conveyor means for wafers Conveyor means for wafers

1988-03-10

1989-10-31

Kashnikow, Andres

Conveyors: power-driven

Conveyor section

Load propelled as the reactive means in a linear motor or...

104140, 1041731, 104281, 104283, B65G 3500

Patent

active

048771236

ABSTRACT:
A conveyor for use in a room with a high degree of cleanness and which can convey wafers one by one stably, without generation of dust. The conveyor has vehicles having a slit in the surface on which a wafer can be placed, permanent magnets provided on the undersurface of the vehicle, and a magnetic fluid interposed between the permanent magnets and a transporting course for floating the vehicle. By moving the vehicle along the transporting course by linear motors or by driving devices of the rope trolley type, wafers are conveyed one by one on the vehicle.

REFERENCES:
patent: 3951074 (1976-04-01), Cooper
patent: 4471716 (1984-09-01), Milliren
patent: 4619573 (1986-10-01), Rathmann et al.
patent: 4669612 (1987-06-01), Mortensen
patent: 4739710 (1988-04-01), Imamura et al.

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