Conveyor for conveying workpieces in a vacuum chamber

Details Conveyor for conveying workpieces in a vacuum chamber Conveyor for conveying workpieces in a vacuum chamber

1992-03-16

1994-02-08

Dayoan, D. Glenn

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

198619, B65G 4900

Patent

active

052844110

ABSTRACT:
A conveyor for conveying a workpiece in a vacuum chamber includes a floating body having a conveying rod, a pair of magnetic bearing portions disposed in a moving direction of the floating body and supporting the floating body solely by magnetic forces, and a non-contact driving motor portion for directly reciprocating the floating body. The floating body is directly reciprocated by a linear pulse motor. The linear pulse motor comprises a motor main body and a cog portion, and the motor main body is interposed between a pair of magnetic bearing portions. The cog portion is disposed in a longitudinal or axial direction of the outer peripheral surface of the floating body and coacts with the motor main body to reciprocate the floating body.

REFERENCES:
patent: 3616978 (1971-11-01), Haslam
patent: 4462529 (1984-07-01), Ladouceur
patent: 4768438 (1988-09-01), Hughes
patent: 5069326 (1991-12-01), Sakamoto et al.
patent: 5105932 (1992-04-01), Bryson, III et al.

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